MgF2 Substrate
Tlhaloso
MgF2 e sebelisoa e le lense, prism le fensetere bakeng sa wavelength ho tloha 110nm ho isa ho 7.5μm.Ke thepa e loketseng ka ho fetisisa e le fensetere bakeng sa ArF Excimer Laser, ka lebaka la phetisetso ea eona e ntle ho 193nm.E boetse e sebetsa joalo ka polarizing ea optical sebakeng sa ultraviolet.
Thepa
| Boima (g/cm3） | 3.18 |
| Melting Point(℃) | 1255 |
| Thermal Conductivity | 0.3 Wm-1K-1 ho 300K |
| Katoloso ea Mocheso | 13.7 x 10-6 /℃ parallel c-axis 8.9 x 10-6 /℃ perpendicular c-axis |
| Knoop Hardness | 415 le 100g indenter (kg/mm2) |
| Bokhoni bo khethehileng ba Mocheso | 1003 J/(kg.k) |
| Dielectric Constant | 1.87 ho 1MHz parallel c-axis 1.45 ho 1MHz perpendicular c-axis |
| Young Modulus (E) | 138.5 GPA |
| Shear Modulus (G) | 54.66 GPA |
| Modulus e mengata (K) | 101.32 GPA |
| Elastic Coefficient | C11=164;C12=53;C44=33.7 C13=63;C66=96 |
| Ho bonahala Moedi wa Elastic | 49.6 MPa (7200 psi) |
| Karolelano ea Poisson | 0.276 |
Tlhaloso ea MgF2 Substrate
MgF2 substrate e bolela karoloana e entsoeng ka thepa ea kristale ea magnesium fluoride (MgF2).MgF2 ke motsoako oa inorganic o entsoeng ka likarolo tsa magnesium (Mg) le fluorine (F).
Li-substrates tsa MgF2 li na le lintho tse 'maloa tse hlokomelehang tse li etsang hore li tuma lits'ebetsong tse fapaneng, haholo-holo libakeng tsa optics le ho beha lifilimi tse tšesaane:
1. Ponaletso e phahameng: MgF2 e na le ponaletso e babatsehang ho ultraviolet (UV), libaka tse bonahalang le tsa infrared (IR) tsa mahlaseli a motlakase.E na le phetiso e pharalletseng ho tloha ho ultraviolet hoo e ka bang 115 nm ho isa ho infrared hoo e ka bang 7,500 nm.
2. Lenane le tlase la refraction: MgF2 e na le index e batlang e le tlase ea refraction, e etsang hore e be thepa e loketseng bakeng sa liphahlo tsa AR le li-optics, kaha e fokotsa ho bonahatsa ho sa batleheng le ho ntlafatsa phetiso ea leseli.
3. Monyetla o tlase: MgF2 e bonts'a ho monya ho tlase libakeng tsa ultraviolet le libaka tse bonahalang tsa spectral.Thepa ena e e thusa lits'ebetsong tse hlokang ho hlaka ho hoholo, joalo ka lilense, liprism le lifensetere bakeng sa mahlaseli a ultraviolet kapa maballo a bonahalang.
4. Ho tsitsa ha lik'hemik'hale: MgF2 e tsitsitse lik'hemik'hale, e hanyetsana le mefuta e mengata ea lik'hemik'hale, 'me e boloka thepa ea eona ea optical le ea' mele tlas'a maemo a mangata a tikoloho.
5. Thermal botsitso: MgF2 e na le ntlha e phahameng ea ho qhibiliha 'me e khona ho mamella mocheso o phahameng oa ho sebetsa ntle le ho senyeha ho hoholo.
Li-substrates tsa MgF2 li sebelisoa ka tloaelo ho lilae tsa optical, lits'ebetso tse tšesaane tsa ho beha lifilimi, le lifensetere tsa optical kapa lilense lisebelisoa le lits'ebetso tse fapaneng.Li ka sebetsa hape e le li-buffer layers kapa litempele tsa kholo ea lifilimi tse ling tse tšesaane, joalo ka lisebelisoa tsa semiconductor kapa lirafshoa tsa tšepe.
Li-substrates tsena hangata li hlahisoa ho sebelisoa mekhoa e kang ho beha mouoane kapa mekhoa ea ho tsamaisa mouoane oa 'mele, moo thepa ea MgF2 e kenngoa holim'a thepa e loketseng ea substrate kapa e hōlileng e le kristale e le 'ngoe.Ho ipapisitsoe le litlhoko tsa ts'ebeliso, li-substrates li ka ba ka sebopeho sa li-wafers, lipoleiti kapa libopeho tse ikhethileng.
